http://warm-ir-heater-shop.com/zh/tags/%E9%A2%84%E9%98%B2/ Recent content in 预防 on The Warm IR Heater Shop Hugo zh Sat, 06 Jun 2026 00:53:56 +0800 http://warm-ir-heater-shop.com/zh/posts/preventing-wafer-warping-with-infrared/ Sat, 06 Jun 2026 00:53:56 +0800 http://warm-ir-heater-shop.com/zh/posts/preventing-wafer-warping-with-infrared/ <p><img src="http://warm-ir-heater-shop.com/images/e619a459508a95cd74ea4eae0be40cd1.png" alt="利用红外线防止晶圆翘曲"></p> <p>在线生产中，翘曲晶圆不仅是废品，更是产量的直接损失和排产的难题。<br> 对流烘箱无法摆脱热惯性和温度梯度，最终导致光刻胶轮廓不一致，薄膜堆栈中产生残余应力。红外加热通过将能量直接输送到所需位置，<a href="https://o-yate.net">且在工艺要</a>求的时间点精准加热，有效解决了这一问题。</p>